INSTRUMENT MODIFICATIONS: UV SAMPLE ILLUMINATION (2011)

Reflected-light microscope images of a resolution-calibration target, CAMECA SIMS test sample. Numbers next to a set of lines (1.0 to 5) indicate width and distance between lines in micro-meters. Resolution of an image corresponds to the minimum width of lines that can be resolved. (a) Original CAMECA IMS 1280 microscope image with white light source. Resolution 3.5µm. Full color image. (b) Modification to blue LED light source (450nm). Resolution 2.5µm. Blue color image. (c) UV light system using LED light source (365nm). Resolution 1.3µm. Monochrome image.

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