Table 1. Elements with possible X-ray Interferences
| Elements | EDS | WDS | Order of | Elements | EDS | WDS | Order of | |
| and Lines | & WDS | only | WDS | and Lines | & WDS | only | WDS | |
| interference | interference | |||||||
| V Ka | x | Cr Ka | x | |||||
| Ti Kb | x | V Kb | x | |||||
| F Ka | x | As Kb | x | 2 | ||||
| Fe La | x | Mn Ka | x | |||||
| Co Ka | x | 3 | Mn Ka | x | ||||
| S Ka | x | Cr Kb | x | |||||
| Cu Ka | x | 4 | Fe Ka | x | ||||
| P Ka | x | Mn Kb | x | |||||
| Co Ka | x | 4 | Ga Kb | x | ||||
| Si Ka | x | As Ka | x | |||||
| Mo La | x | Zr Kb | x | |||||
| S Ka | x | Mo Ka | x | |||||
| Pb La | x | Al Ka | x | 4 | ||||
| As Ka | x | Cr Kb | x | |||||
| Re La | x | Sn Ka | x | 2 | ||||
| Zn Ka | x | Pb Lb | x | |||||
| Ni Ka | x | 5 | Ba Lb | x | ||||
| Al Ka | x | Ce La | x | |||||
| F Ka | x | 3 | N Ka | x | ||||
| P Ka | x | Ti L(l) | x | |||||
| Ni La | x | 3 | O Ka | x | ||||
| C Ka | x | Cu Lb | x | 2 | ||||
| Si Kb | x | B Ka | x | |||||
| Sr La | x | Mo Mg | x | |||||
| Zn La | " | |||||||
| P Ka | x | Na Ka | EDS only | |||||
| Ca Kb | x | 2 | Zn La | " | ||||
| Cr Ka | x | Na Ka | EDS only | |||||
| As Ka | x | 2 | Cu La | " |