Table 2. Comparison of WDS and EDS
WDS |
EDS | |
1. High spectral resolution (2-6 eV) | 1. Low spectral resolution (130-155 eV) | |
2. Low collection efficiency (slower) | 2. High collection efficiency (faster) | |
3. Higher P/B | 3. Lower P/B | |
4. Highly sensitive to geometric effects | 4. Low sensitivity to sample geometry | |
5. Few spectral artifacts | 5. Several spectral artifacts | |
6. No LN required | 6. LN required* | |
7. Moving mechanical parts | 7. No moving mechanical parts** | |
8. Relatively high beam current typical | 8. Lower beam current feasible | |
9. Great for majors and traces | 9. Great for majors, poor for traces | |
10. Very expensive to purchase | 11. Less expensive to purchase | |
* Some recent claims of LN-free new models | ||
** Except for retractable models |