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Table 2. Comparison of WDS and EDS

WDS

EDS

1. High spectral resolution (2-6 eV) 1. Low spectral resolution (130-155 eV)

2. Low collection efficiency (slower) 2. High collection efficiency (faster)

3. Higher P/B 3. Lower P/B

4. Highly sensitive to geometric effects 4. Low sensitivity to sample geometry

5. Few spectral artifacts 5. Several spectral artifacts

6. No LN required 6. LN required*

7. Moving mechanical parts 7. No moving mechanical parts**

8. Relatively high beam current typical 8. Lower beam current feasible

9. Great for majors and traces 9. Great for majors, poor for traces

10. Very expensive to purchase 11. Less expensive to purchase

* Some recent claims of LN-free new models

** Except for retractable models

WDS		EDS
1. High spectral resolution (2-6 eV)		1. Low spectral resolution (130-155 eV)
2. Low collection efficiency (slower)		2. High collection efficiency (faster)
3. Higher P/B		3. Lower P/B
4. Highly sensitive to geometric effects		4. Low sensitivity to sample geometry
5. Few spectral artifacts		5. Several spectral artifacts
6. No LN required		6. LN required*
7. Moving mechanical parts		7. No moving mechanical parts**
8. Relatively high beam current typical		8. Lower beam current feasible
9. Great for majors and traces		9. Great for majors, poor for traces
10. Very expensive to purchase		11. Less expensive to purchase
		* Some recent claims of LN-free new models
		** Except for retractable models